Digital Capacitance Manometers
Exact Pressure Measurement in Thin-Film Applications
The CMC and XacTorr Series digital capacitance manometers from Brooks Instrument are used in vacuum applications in thin-film processes. The devices are featuring improved measurement reliability, minimized drift.
The manometers resist diaphragm contamination and minimize thermal effects in vacuum measurement applications. The CMC Series manometers are compact, unheated gauges featuring robust all-welded construction and Inconel sensing diaphragm. The combination of precision components and a wide temperature compensated operating range allows the CMC Series to deliver precise zero and span temperature coefficients for optimum measurement stability. They are available in full-scale ranges from 10 to 1,000 Torr, making them an ideal upgrade for small form-factor capacitance manometers and an
Picture: Brooks Instruments
economical alternative to full-sized unheated gauges.
XacTorr digital capacitance manometers are premium, heated gauges that use dual-zone heating to ensure 0.1 K temperature uniformity. These compact gauges provide superior reliability by combining Mark-IV shielded sensor technology and digital temperature control, which reduce the buildup of condensable products that lead to process drift and premature gauge failure. The XacTorr capacitance manometers are offered in three operating temperatures (45, 100 and 160 degrees Celsius) with full-scale measurement ranges from 100 milliTorr to 1,000 Torr.