Metallization Paste Dryer
Cutting VOC Emissions
Developed for advanced drying of metallization pastes, the DriTech dryer offers unique, patent-pending hybrid heating technology and an updated design that decouples the VOC removal and binder burn-off and delivers a more flexible and efficient drying process.
A centrally located point-of-generation thermal oxidizer provides maintenance-free VOC abatement ensuring that the chamber remains free of contaminates and that smoke and solvent do not leave the ends of the dryer. Increased air dilution reduces the solvent concentration within the chamber and eliminates dead spots. Airflow is managed to reduce cold air entrainment at the entrance and exit. The dryer is designed for a fast peak thermal profile that delivers lower wafer exit temperature and maximum VOC release at an early stage, resulting in maximum paste drying efficiency. The dryer has a comparatively small footprint, operates at fast belt speeds, and can handle the most difficult-to-dry pastes.
