Integrated Vacuum Pumping and Pollution Abatement

Small Floor Space Requirements for Exhaust Management

September 5, 2011

The Zenith exhaust management system integrates vacuum pumping and pollution abatement into a single system.

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It provides manufacturers with a highly efficient, low-cost-of-ownership solution that meets the latest manufacturing and environmental requirements. It is easy to install and use, and it saves valuable fab floor space. The system’s Green Mode feature provides reductions in energy consumption, resulting in reduced environmental impact and cost-of-ownership savings.

CONTACT www.edwardsvacuum.com

EU PVSEC  Hall A1 — B25